Ultris Series

The NIMBUS Series is an advanced automatic video measurement machine that helps you achieve fast, precise, and effortless quality checks. Designed for industries that demand accuracy, it combines a high-resolution camera, intelligent lighting, and powerful software to deliver reliable results every time.

DESCRIPTION

The ULTRIS Series represents the next generation of high-speed spectroscopic ellipsometry, engineered for ultra-fast, non-destructive thin film measurements across a variety of industries. Designed to meet the demands of semiconductor fabrication, flexible electronics, and advanced display manufacturing, the ULTRIS Series delivers rapid, high-precision measurements of film thickness, optical constants, and uniformity across large areas. It features a robust hardware platform with a high-speed detector, advanced light source,
and automated stage, ensuring maximum throughput without compromising accuracy. Its intuitive software enables real-time data analysis, automated recipe creation, and comprehensive reporting, significantly boosting productivity on the factory floor or in the R&D lab. With ULTRIS, manufacturers and researchers can confidently control quality and accelerate time-to-market.

1.Parts Can Be Measured Regardless of Orientation
The location and orientation of the part placed on the measurement stage is automatically detected. No need for precise fixturing of the part.

2. Simultaneous measurements

SPECIFICATION

Model ULTRIS 100 ULTRIS 200
Field of View(mm) 90×60 170×113
Measuring Accuracy(μm) 5.0
Repeatability(μm) 2.0
Measuring speed(within 100 dimensions) 3s
 

 

Image and Measuring

CCD 20 million pixel CCD
Lens Bilateral telecentric lens
Depth of field( mm) 30
Maximum workpiece height 100mm
Working distance 260mm 280mm
Linear scale resolution 0.1 μm
Driving system CNC control, close-loop AC Servo driving system, mouse control
lllumination Parallel backlighting, Circumferential surface light
Weight 160 KG 190 KG
Dimension (mm) (L·W·H) 600×500×1600 600×500×1600

SOFTWARE

By combining the expertise of seasoned professionals with the latest technological developments, this software offers unparalleled precision and accuracy in measurement tasks. With a focus in simplicity and ease of use, inspect 3D provides users with a seamless experience, allowing them to achieve precise measurements efficiently. Its robust design ensures stability and reliability, even in the most demanding environments, while also being easy to maintain for continued optimal performance.

Software
-Concise And User-Friendly Interface
-Powerful Geometric Measurement Functions
-Convenient And Quick Measurement Of Comple Shapes and Large Batch Workpieces
-Quick Navigation Function For Locating Local Features
-Export To Cad In Dxf/Dwg
-Automatic Calculation Of Geometric Tolerances
-Diverse Data Reporting And Graphical Data Export Functions

APPLICATION

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Request a Quote or Further Information

Please fill in the request form below and one of our engineers will contact you to discuss your system requirements and if we can help, our typical response time is within 1 – 3 working day.