Elite Series

The NIMBUS Series is an advanced automatic video measurement machine that helps you achieve fast, precise, and effortless quality checks. Designed for industries that demand accuracy, it combines a high-resolution camera, intelligent lighting, and powerful software to deliver reliable results every time.

DESCRIPTION

Desciption of Elite Series

The ELITE Series is the flagship spectroscopic ellipsometry system designed to deliver unparalleled performance for thin film characterization. Equipped with a wide spectral range, advanced modeling software, and high-resolution optics, the ELITE Series is perfect for cutting-edge applications in semiconductors, optoelectronics, photovoltaics, and advanced coatings. It provides precise measurements of thickness, refractive index, extinction coefficient, and complex multilayer structures, making it indispensable for both R&D labs and production lines. With its intuitive software interface, robust hardware, and extensive material library, the ELITE Series empowers users to achieve high-precision, repeatable results with minimal effort, accelerating innovation and improving product quality across industries.

Features

1. Fast Measurement.

2. Suitable for large size sample.

3. Break the conventions of size measuremnet. One machine can supply all solution.

4. Large aperture high depth of field, full field of vision imaging clear, ultra-low distortion.

5. High resolution digital camera. The instrument uses a high resolution digital camera ranging from 12 million to 43 million pixels.

6. The software adopts advanced 20:1 subpixel image edge processing.

7. Software process can automatically remove burrs and outliers, and reduce the impact on the feature location to a minimum.

8. Automatic identification of the workpiece without positioning.

9. The measurement range can measure more than 5,000 dimensions at one time, and the measurement time of 100 dimensions is less than 1 second, which greatly reduces the measurement time and improves the measurement efficiency.

10. Arbitrary placement of multiple workpieces, automatic identification,
batch measurement.

SPECIFICATION

Model ELITE 300 ELITE 500 ELITE 800
XY Stage (motorized) 300 x 200 x 200 500 x 400 x 200 800 x 600 x 200
Grating Scale Resolution 0.1 μm
Camera 12MP black and white camera

& 8.9 MP HD color camera

20 MP black and white

camera

& 2 MP HD color camera

Lens Double telecentric lens Telecentric lens & 0.7 X-

4.5X motorized zoom lens

Maximum measurable product size(mm) 300 x 200 500 x 400 800 x 600
 

 

Measuring accuracy

Wide-field measurement

mode

Without Stage movement ±2.0 μm
With Stage Movement ± (1.5+L/250) μm ± (2.0+L/200) μm ± (6.0+L/00) μm
High-precision measurement

mode

Without Stage movement ±1.0μm
With Stage Movement ± (1.3+L/250)μm ± (1.8+L/200)μm ± (2.3+L/200)μm
 

 

Repeat accuracy

Wide-field measurement

mode

Without Stage movement  

±1.5μm

 

±2.0μm

With Stage Movement
High-precision measurement

mode

Without Stage movement  

±1.5μm

With Stage Movement
Reflective Lighting System Four bar lighting, ring etc directional lighting
Transmission lighting system Transmission illumination
Maximum number of measurable workpiece’s size at one time 5000
Maximum number of measurable workpiece at one time 1000
Automatic testing After placing, it can be measured with one button, automatically identify the measuring position, automatically test, and automatically determine whether the result is correct
Workpiece testing position Support any position, can search and measure the target object
Max Load 20 kg
Weight(kg) 310 kg 620 kg 1650 kg
Size(mm)(L×W×H) 640 x 910 x 1650 1100 x 1450 x 1650 1550 x 1750 x 1650

SOFTWARE

The software features a simple and intuitive interface, powerful functionality, and ease of learning. Our independently developed distortion correction technology ensures stable and accurate measurement results across all positions and angles within the field of view. Additionally, our proprietary image stitching technology guarantees a stitching error of less than 0.003mm. (customizable software features are available
upon request.)

APPLICATION

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Request a Quote or Further Information

Please fill in the request form below and one of our engineers will contact you to discuss your system requirements and if we can help, our typical response time is within 1 – 3 working day.